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Laboratory of microwave discharge physics and carbon materials synthesis
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Facilities
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1. CVD reactor with cylindrical microwave resonator
Setup for chemical vapour deposition of diamond films on substrates up to 75 mm diameter, using microwave radiation with frequency 2.45 GHz from 5 kW magnetron for plasma creation
References:
1. V. A. Koldanov, A. M. Gorbachev, A. L. Vikharev, and D. B. Radishchev, Self-Consistent Simulation of Pulsed and Continuous Microwave Discharges in Hydrogen, Plasma Physics Reports, 31 (2005) N 11, 965
2. A. L. Vikharev, A. M. Gorbachev, A. B. Muchnikov and D. B. Radishchev, Study of microwave plasma-assisted chemical vapor deposition of poly-and single-crystalline diamond films, Radiophysics and Quantum Electronics, 50 (2007) N 10-11, 913 |
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2. CVD reactor with ellipsoidal microwave resonator
Setup for chemical vapour deposition of diamond films on substrates up to 75 mm diameter, using microwave radiation with frequency 2.45 GHz from 6 kW magnetron for plasma creation
References:
AIXTRON
CVD diamond |
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3. CVD reactor with 28 GHz gyrotron
Setup for chemical vapour deposition of diamond films on substrates up to 100 mm diameter, using microwave radiation with frequency 28 GHz from 15 kW gyrotron for plasma creation.
CVD method of high quality polycrystalline diamond films growth was implemented, with linear growth rate of 10-15 μm/hour, which is 5-7 times higher than the growth rate of diamond films with the same quality in conventional 2.45 GHz CVD reactors.
References:
1. A. L. Vikharev, A.M. Gorbachev, A.V. Kozlov, V.A. Koldanov, A.G. Litvak, N.M. Ovechkin, D.B. Radishev, Yu.V. Bykov, M. Caplan, Diamond films grown by millimeter wave plasma-assisted CVD reactor, Diamond and Related Materials, 15 (2006) 502
2. A.L. Vikharev, A.M. Gorbachev, A.V. Kozlov, D.B. Radishev, A.B. Muchnikov "Microcrystalline diamond growth in presence of argon in millimeter wave plasma-assisted CVD reactor", Diamond and Related Materials, 17 (2008) 1055
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4. Experimental base, including other setups::
- laser cutting of diamond films/disks
- diamond films/disks lapping and polishing
- laser Raman spectroscopy
- scanning electron microscopy (based on JEOL 6390 LA SEM)
- diamond disks heat conductivity measurements |
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